Semiconductor Thin Films

Thin film materials for semiconductor manufacturing

Thin film deposition is among the key processes of semiconductor manufacturing. By designing and building thin film deposition tools such as atomic layer deposition (ALD) and plasma enhanced chemical vapor deposition (PECVD), we study the deposition mechanisms and material properties of metallic, dielectric, and semiconductive thin films, which could be used as high-k dielectric layers, etching hardmasks, EUV dry resists and etc in semiconductor manufacturing processes.